USED Mattson Aspen II Configurator (sold no longer
available)
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System :
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Refurbishment
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Refurbishments and Used equipment
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Small scratches and dents are present on a USED and refurbished system. As many of the original parts are still in very good condition
these are re-used or refurbished instead of replacing these parts with brand new parts. This ensures that the costs same within the boundaries of a refurbishment. All
parts are given the same warranty and will be exchanged if necessary with new or refurbished parts during that period.
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Platform type
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ICP Aspen II
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Platform Wafer Size
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200mm
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Chamber Back
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Chamber Right
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Process Chamber Configuration
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ICP
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ICP
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PC
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366MHZ CPU TESTED
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All NEW ANALOG IN and OUT PCB
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SECII card (tested)
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NEW floppy drive
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Refurbished DI/DO cards
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NEW Robot stepper (SMC-PC3)
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New chassis
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New Power supply
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New backing plain
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Front end
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Standard
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NEW 26 inch opening with separated operator interface
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Light Tower
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4 colour light tower
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Operator / Engineering monitor
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TFT design monitor (NEW)
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Gas box
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NEW gas box design and NEW sub frames
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EMO buttons
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Operator, Engineer, Side and Rear, Schrauded NEW
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Interlock circut
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NEW Push button switches
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Panels
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Hanging panels all new
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Load Lock
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Number of load locks
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Single L/L, 2 cassette station, capacility of queuing lots.
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Pin Search Assy
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Proximity sensors NEW
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Load Lock Seal ,
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Lip Seal Mattson standard (NEW)
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Platform ,Cassette Config,
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4 x 25 slot cassette. 8 inch, Rotating cassette nests Refurbished
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Cool down station
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Standard flat cooldown station without water lines
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Loadlock fast exchange
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New
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Transfer Robot
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Main robot
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Mattson standard 3 axis Robot (Refurbished) Flex cable New
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Robot Arm
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4 adjustable paddles (NEW) standard
Arm (Refurbished)
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Slit door
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New design slit doors (Refurbished)
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Wafer sensors
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Paddles, Front and Rear cassettes
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Shuttle
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Refurbished 26inch opening
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Process Module Configuration
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Chamber Back
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Chamber Right
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Heater block Configuration
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USED Mattson heater rod design
Can be configured and new Electrical heater with backing plate (NEW)
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USED Backing plate heater
Can be configured and new Electrical heater with backing plate (NEW)
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Tube type
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quartz tube (NEW)
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quartz tube (NEW)
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Process window
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standard (NEW)
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standard (NEW)
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ICP Chamber O-ring type
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Flurosilicon (NEW)
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Flurosilicon (NEW)
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Temperature controller
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Watlow 988 or (EZ zone NEW)
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Watlow 988 or (EZ zone NEW)
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Thermal couples
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Mattson spring loaded TC NEW
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Mattson spring loaded TC NEW
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Lift pin assy
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Refurbished
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Refurbished
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grids / guide rings
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Extended guide rings (NEW)
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Extended guide rings (NEW)
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Electrical feed through
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NEW
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NEW
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Manifold and ceramic parts
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NEW
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NEW
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Isolation valve
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NEW
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NEW
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Top plate
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Cleaned
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Cleaned
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Loadlock
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Cleaned
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Cleaned
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Chamber
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Cleaned
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Cleaned
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Cool down station
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Anadized top and bottom top NEW
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No water cooling
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Used Lexan plates
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Pressure controller
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VAT valve (NEW)
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VAT valve (NEW)
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Chamber manometer
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10 torr (NEW)
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10 torr (NEW)
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Loadlock manometer
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100 torr manometer
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100 torr manometer
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Shuttle manometer
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1000 torr manometer
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1000 torr manometer
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RF/ MW System
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RF system
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Top RF = 13.56 Mhz
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Top RF = 13.56 Mhz
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RF generators
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2x RFPP10s refurbished
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2x RFPP10s refurbished
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RF Top match
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Trazar Match 914-92003-00
(TRAZAR AMU 10D-2)
(Manufacturer Refurbished)
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Trazar Match 914-92003-00
(TRAZAR AMU 10D-2)
(Manufacturer Refurbished)
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RF coils
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Re-silvered
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Re-silvered
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RF Vac caps
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100PF NEW 125 variable cap NEW
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100PF NEW 125 variable cap NEW
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AC BOX
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Configured for 3 or 2 phase generators. New safety cover
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DC BOX
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NEW
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Gas System
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Configurable
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Chamber Peripherals ,Gas Line Option ,
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4 Gas Configuration rear chamber
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4 Gas Configuration SIDE chamber
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Gas # 1
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USED O2 - 10000sccm
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USED O2 - 10000sccm
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MFC type , Model
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Customer option (NEW)
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Customer option (NEW)
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Gas # 2
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USED N2 - 1000sccm
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USED N2 - 1000sccm
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MFC type , Model
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Customer option (NEW)
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Customer option (NEW)
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Gas # 3
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USED N2/H2 (4%) - 2000sccm
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USED N2/H2 (4%) - 2000sccm
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MFC type , Model
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Customer option (NEW)
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Customer option (NEW)
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Gas # 4
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USED CF4 - 100sccm
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USED CF4 - 100sccm
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MFC type , Model
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Customer option (NEW)
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Customer option (NEW)
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Gas box
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Gas box on top of chamber (New design)
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Gas box on top of chamber (New design)
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GAS VCR gasket
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S/S and Nickel (NEW)
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S/S and Nickel (NEW)
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Gas lines
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All NEW
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All new filters
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Gas channel
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Bottom feed channel NEW
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Junction box NEW
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Software
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Software version
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QNX 2.21 Mattson software. 5.56G
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Others :
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Endpoint detection system (monochromator vs filters)
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NEW Mattson Endpoint system with Fixed filters 1st: 430 2nd: 520
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NEW Mattson Endpoint system with Fixed filters 1st: 430 2nd: 520
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Cable length RF/ SIGNAL/ POWER
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19ft
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